Share Email Print
cover

Proceedings Paper

Optical 3D monitoring VLSI structures
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Phase object pattern analysis has shown the possibility of considerably increasing microscope spatial resolution. Experiments have revealed more than ten times resolution enhancement. Some phase object images inside an Airy disk are presented.

Paper Details

Date Published: 1 June 1992
PDF: 3 pages
Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); doi: 10.1117/12.59838
Show Author Affiliations
Vladimir P. Tychinsky, Moscow Institute for Radioengineering, Electronics, and Automation (Russia)
Alexander V. Tavrov, Moscow Institute for Radioengineering, Electronics, and Automation (Russia)


Published in SPIE Proceedings Vol. 1673:
Integrated Circuit Metrology, Inspection, and Process Control VI
Michael T. Postek, Editor(s)

© SPIE. Terms of Use
Back to Top