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Proceedings Paper

Femtosecond-laser microstructuring of silicon for novel optoelectronic devices
Author(s): Jim Carey; Eric Mazur
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Proc. SPIE 5714, Commercial and Biomedical Applications of Ultrafast Lasers V, ; doi: 10.1117/12.598249
Show Author Affiliations
Jim Carey, Harvard Univ. (United States)
Eric Mazur, Harvard Univ. (United States)


Published in SPIE Proceedings Vol. 5714:
Commercial and Biomedical Applications of Ultrafast Lasers V
Joseph Neev; Christopher B. Schaffer; Andreas Ostendorf; Stefan Nolte, Editor(s)

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