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Proceedings Paper

Testing of MEMS/MOEMS/MNT devices and systems
Author(s): Henne van Heeren; Ayman El-Fatatry; Lia Paschalidou; Patric R. Salomon
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Paper Abstract

Unlike electronic devices, where for analysis only electrical parameters need to be tested, Micro and Nano Technology (MNT) devices require precise measurement of multi domain parameters for characterization. Furthermore, the sensitivities require other or improved technologies. For instance, for testing a MEMS device, a stable supply of physical energy is required and must be transferred to the product in a reproducible way. Also a sensitive measuring technology is necessary to detect the electrical signal produced as a response to the physical energy on the device. Sometimes interactions between input and output make measuring difficult. A third point is that handling of the devices is difficult due to their non-standard sizes and small dimension. Also MST including MEMS and MOEMS devices require new types of reliability testing addressing stiction, and other specific failure modes. Thus, the testing of MNT devices is much more complex than standard electronic components. Currently standardized tests are often not available, neither is there sufficient background information available about MNT testing, as most of the companies regard testing experience, and especially product testing, as company confidential information. However, the MNT industry can utilise existing testing equipment. This article addresses the available equipment for MNT testing in relation to the industry needs. Examples of the instruments discussed include optical profilers for dynamic measurement of MOEMS/MEMS devices, such as gyros and accelerometers, and wafer testers for optical products.

Paper Details

Date Published: 22 January 2005
PDF: 13 pages
Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); doi: 10.1117/12.598246
Show Author Affiliations
Henne van Heeren, EnablingM3 (Netherlands)
Ayman El-Fatatry, SEIC/BAE SYSTEMS and Loughborough Univ. (United Kingdom)
Lia Paschalidou, Market Intelligence Consultant (United Kingdom)
Patric R. Salomon, 4M2C PATRIC SALOMON GmbH (Germany)

Published in SPIE Proceedings Vol. 5719:
MOEMS and Miniaturized Systems V
Ayman El-Fatatry, Editor(s)

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