Share Email Print

Proceedings Paper

Microautomation of semiconductor fabrication
Author(s): Ilene J. Busch-Vishniac
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Micro-automation is defined as the automatic control of processes that require that relative motions be achieved with micron or submicron accuracy. This article discusses micro- automation of mechanical processes in fabrication of semiconductor devices. We identify a few applications of micro-automation, elaborate on the general system requirements, and present a specific realization of a micro-automation system which uses optical sensing and magnetic actuation.

Paper Details

Date Published: 1 June 1992
PDF: 11 pages
Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); doi: 10.1117/12.59817
Show Author Affiliations
Ilene J. Busch-Vishniac, Univ. of Texas/Austin (United States)

Published in SPIE Proceedings Vol. 1673:
Integrated Circuit Metrology, Inspection, and Process Control VI
Michael T. Postek, Editor(s)

© SPIE. Terms of Use
Back to Top