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Proceedings Paper

Expert system for performing measurement system characterization
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Paper Abstract

The considerations which drive an expert system for assisting in measurement system characterization are described. The expert system employs several novel techniques for evaluating the integrity of a characterization analysis by determining the degree to which critical assumptions are satisfied and flagging weak points in the data collection or analysis procedure. The properties of good characterization sampling plans are derived. Methods for formulating reliable characterization studies are described. The paper focuses on short term studies intended for equipment comparisons and calibrations; however, with minor alterations it can be expanded to include longer term stability studies.

Paper Details

Date Published: 1 June 1992
PDF: 12 pages
Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); doi: 10.1117/12.59815
Show Author Affiliations
Robert R. Hershey, Motorola, Inc. (United States)
Terrence E. Zavecz, TEA Systems Corp. (United States)

Published in SPIE Proceedings Vol. 1673:
Integrated Circuit Metrology, Inspection, and Process Control VI
Michael T. Postek, Editor(s)

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