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Proceedings Paper

Scanning probe metrology
Author(s): David A. Grigg; Joseph E. Griffith; G. P. Kochanski; Michael J. Vasile; Phillip E. Russell
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Paper Abstract

The design of a scanning probe microscope suitable for metrology applications must include solutions to several problems. Actuator errors can be large because of their nonlinear behavior, but this can be solved by independently monitoring the actuator's motion. The probe must be shaped properly for a given measurement, and it must be characterized to allow interpretation of the measurement. We have studied the effects of interaction forces and probe shape with emphasis on surface roughness measurements.

Paper Details

Date Published: 1 June 1992
PDF: 11 pages
Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); doi: 10.1117/12.59814
Show Author Affiliations
David A. Grigg, North Carolina State Univ. (United States)
Joseph E. Griffith, AT&T Bell Labs. (United States)
G. P. Kochanski, AT&T Bell Labs. (United States)
Michael J. Vasile, AT&T Bell Labs. (United States)
Phillip E. Russell, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 1673:
Integrated Circuit Metrology, Inspection, and Process Control VI
Michael T. Postek, Editor(s)

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