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Proceedings Paper

Reduction of edge defocus by modification of chuck shape on Nikon scanner S204B
Author(s): Ying-Ku Lin; Chung-Chi Lin; Michael Tseng; Chih Chung Huang
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Paper Abstract

Edge defocus can be reduced by several techniques on a Nikon S204 scanner. By using main software MCSV version 3.44 or above, as well as disable range, and scan direction. Edge defocus can be reduced but is not eliminated at 3 o'clock and 4 o'clock. Wafer flatness is studied to investigate the cause of this defocus. The chuck shape is the key to avoid to defocusing at these two positions. Modification of chuck shape can reduce yield loss.

Paper Details

Date Published: 17 May 2005
PDF: 8 pages
Proc. SPIE 5755, Data Analysis and Modeling for Process Control II, (17 May 2005); doi: 10.1117/12.598097
Show Author Affiliations
Ying-Ku Lin, United Microelectronics Corp. (Taiwan)
Chung-Chi Lin, United Microelectronics Corp. (Taiwan)
Michael Tseng, United Microelectronics Corp. (Taiwan)
Chih Chung Huang, United Microelectronics Corp. (Taiwan)

Published in SPIE Proceedings Vol. 5755:
Data Analysis and Modeling for Process Control II
Iraj Emami, Editor(s)

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