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Proceedings Paper

Novel approach to placement accuracy analysis
Author(s): Ken'ichi Kawakami
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Paper Abstract

This paper presents a new mathematical method to analyze placement errors. Using several Hilbert space principles, we analyze placement errors by decomposing them into basic distortion patterns. The second section discusses overlay error in general and mathematically treats mask distortion. Distortion data is represented as a linear combination of the basic distortion pattern. For typical distortions, these coefficients are shown in section 3. An example of analysis is given in section 4 and the discussions are summarized in section 5.

Paper Details

Date Published: 1 June 1992
PDF: 11 pages
Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); doi: 10.1117/12.59793
Show Author Affiliations
Ken'ichi Kawakami, Fujitsu Ltd. (Japan)


Published in SPIE Proceedings Vol. 1673:
Integrated Circuit Metrology, Inspection, and Process Control VI
Michael T. Postek, Editor(s)

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