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Proceedings Paper

Optical characterization of diffractive optical elements replicated in polymers
Author(s): Sigitas Tamulevicius; Giedrius Janusas; Asta Guobiene; Arvydas Palevicius; Vytautas Ostasevicius; Mindaugas Andrulevicius
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Paper Abstract

Due to relative ease and cost effectiveness with which planar polymeric structures can be fabricated, diffractive optical elements replication in polymeric substrates are receiving global attention for a myriad of planar photonic and optoelectronic applications including optical interconnects. In this work we present an optical laser control method to control replication of microperiodic profile structures in polymers. Diffraction efficiency of diffraction gratings (originally produced in silicon, quartz glass and in replicated polymer substrates) was measured experimentally and estimated using linear dimensions of gratings or replica defined by atomic force microscopy (AFM). Diffraction efficiency of periodic structure was used to control the surface relief formation during the combined ion etching of crystalline Si (100) and replication of this structure using UV light hardening and hot embossing. The main experimental results are compared with the computer simulations where the standard programme (PCGrate-SX6.0) was employed.

Paper Details

Date Published: 10 May 2005
PDF: 8 pages
Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); doi: 10.1117/12.597628
Show Author Affiliations
Sigitas Tamulevicius, Kaunas Univ. of Technology (Lithuania)
Giedrius Janusas, Kaunas Univ. of Technology (Lithuania)
Asta Guobiene, Kaunas Univ. of Technology (Lithuania)
Arvydas Palevicius, Kaunas Univ. of Technology (Lithuania)
Vytautas Ostasevicius, Kaunas Univ. of Technology (Lithuania)
Mindaugas Andrulevicius, Kaunas Univ. of Technology (Lithuania)

Published in SPIE Proceedings Vol. 5752:
Metrology, Inspection, and Process Control for Microlithography XIX
Richard M. Silver, Editor(s)

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