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Proceedings Paper

High-resolution microelectromechanical scanners for miniaturized dual-axes confocal microscopes
Author(s): Hyejun Ra; Il-Woong Jung; Daesung Lee; Uma Krishnamoorthy; Kyoungsik Yu; Olav Solgaard
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Paper Abstract

In this paper we present scanning micromirrors, actuated by self-aligned, bidirectional, vertical electrostatic combdrives, for dual-axes confocal microscopy. The fabrication process, which is based on Deep Reactive Ion Etching (DRIE) of Silicon-on-insulator (SOI) wafers with two silicon device layers, requires only three lithography steps for one-dimensional scanners, while an additional two lithography steps must be performed to create two-dimensional scanners. Only front side processing is required and the two oxide layers of the double SOI wafers provide efficient and reliable etch stops. These features combined with the fact that the combs are self aligned, enable high-speed, high-resolution microscanners with stable and reliable operation as required for endoscopic implementations of confocal microscopes.

Paper Details

Date Published: 22 January 2005
PDF: 4 pages
Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); doi: 10.1117/12.597331
Show Author Affiliations
Hyejun Ra, Stanford Univ. (United States)
Il-Woong Jung, Stanford Univ. (United States)
Daesung Lee, Stanford Univ. (United States)
Uma Krishnamoorthy, Stanford Univ. (United States)
Kyoungsik Yu, Stanford Univ. (United States)
Olav Solgaard, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 5721:
MOEMS Display and Imaging Systems III
Hakan Urey; David L. Dickensheets, Editor(s)

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