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Proceedings Paper

Novel chemical amplification positive-resist material for EB lithography
Author(s): Naoko Kihara; Tohru Ushirogouchi; Tsukasa Tada; Takuya Naito; Satoshi Saito; Osamu Sasaki
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Paper Abstract

This paper reports on a novel three-component chemical amplification positive resist system for EB lithography composed of a novolak resin, an acid generator, and a newly synthesized dissolution inhibitor. We synthesized a novel dissolution inhibitor named CP-TBOC (1), which contains a tert-butoxycarbonyl (t-BOC) group and a lactone ring, to obtain resist materials with high sensitivity and high contrast. The t-BOC group of this dissolution inhibitor effectively decomposed by an acid catalyzed thermal reaction as the other conventional dissolution inhibitors. In addition to this decomposition, the lactone ring of the decomposed product was spontaneously cleft in an aqueous base to generate carboxylic acid, further enhancing the solubility to alkaline developers. The subsequent cleavage in an aqueous developer was investigated by UV-visible spectroscopy. The highest EB sensitivity was obtained at a CP-TBOC concentration of approximately 4.7 X 10-4 mol/g.

Paper Details

Date Published: 1 June 1992
PDF: 10 pages
Proc. SPIE 1672, Advances in Resist Technology and Processing IX, (1 June 1992); doi: 10.1117/12.59730
Show Author Affiliations
Naoko Kihara, Toshiba Research and Development Ctr. (Japan)
Tohru Ushirogouchi, Toshiba Research and Development Ctr. (Japan)
Tsukasa Tada, Toshiba Research and Development Ctr. (Japan)
Takuya Naito, Toshiba Research and Development Ctr. (Japan)
Satoshi Saito, Toshiba Research and Development Ctr. (Japan)
Osamu Sasaki, Toshiba Research and Development Ctr. (Japan)


Published in SPIE Proceedings Vol. 1672:
Advances in Resist Technology and Processing IX
Anthony E. Novembre, Editor(s)

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