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Proceedings Paper

Improvement of the lifetime of the optical coatings under high power laser irradiations
Author(s): Ryuji Biro; Tetsuzo Ito; Seiji Kuwabara; Hirotaka Fukushima; Hideo Akiba; Keisui Banno; Yasuyuki Suzuki; Minoru Otani; Kazuho Sone
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Paper Abstract

To maintain high transmittance for long time use in the ArF and F2 lithography exposure tools is highly requested, which is strongly dependent on the transmittance of the optical coatings. The following experimental fact was reported in the F2 laser durability testing; the transmittance degradation of the optical coatings did not occur under low power laser irradiation of less than 5 mJ/cm2, but a catastrophic degradation of transmittance did under high power laser irradiation over 15 mJ/cm2. We have set a program to investigate the causes of the laser-induced degradation of the optical coatings. Consequently, we have found a relationship between the contaminations of the irradiation atmosphere and the transmittance degradation through various experimental conditions and analyses such as SIMS and GCMS. Finally, we have succeeded in remarkably improving the durability of the antireflection coating (ARC) by optimizing the atmospheric conditions.

Paper Details

Date Published: 12 May 2004
PDF: 8 pages
Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2004); doi: 10.1117/12.597156
Show Author Affiliations
Ryuji Biro, Canon Inc. (Japan)
Tetsuzo Ito, Canon Inc. (Japan)
Seiji Kuwabara, Canon Inc. (Japan)
Hirotaka Fukushima, Canon Inc. (Japan)
Hideo Akiba, Canon Inc. (Japan)
Keisui Banno, Canon Inc. (Japan)
Yasuyuki Suzuki, Canon Inc. (Japan)
Minoru Otani, Canon Inc. (Japan)
Kazuho Sone, Canon Inc. (Japan)


Published in SPIE Proceedings Vol. 5754:
Optical Microlithography XVIII
Bruce W. Smith, Editor(s)

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