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Proceedings Paper

Microfabrication of overhanging shape using LCD microstereolithography
Author(s): Gohki Oda; Takashi Miyoshi; Yasuhiro Takaya; Taeho Ha; Keiichi Kimura
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Paper Abstract

Stereolithography is one of the Rapid Prototyping and manufacturing technologies which enable to fabricate three dimensional structures easily, quickly and automatically from computer-aided design (CAD) drawing. But it is much difficult to realize microfabrication quickly and accurately using conventional laser-scanning stereolithography due to thick layer of lamination and long time of fabrication. In order to overcome these difficulties, the liquid crystal display (LCD) microstereolthography has been developed in our laboratory, which enable microfabrication of a complete layer by only one irradiation, at high speed as well as high accuracy by continuous laminating of thin layers using the LCD as a live-motion mask. We performed the fundamental experiments to fabricate general 3D micro structure consisting of the overhanging shape using the LCD live-motion mask microstereolithography, and tried to fabricate a microspring with several ten micrometers size as one example.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596758
Show Author Affiliations
Gohki Oda, Osaka Univ. (Japan)
Takashi Miyoshi, Osaka Univ. (Japan)
Yasuhiro Takaya, Osaka Univ. (Japan)
Taeho Ha, Osaka Univ. (Japan)
Keiichi Kimura, Kyushu Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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