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Proceedings Paper

Fabrication of precision microholes and structures with smooth surfaces by a high repetition rate femtosecond laser
Author(s): Takayuki Nakaya; Daisuke Shibata; Hidetoshi Takeda; Hiroaki Toshima; Toshiro Kotaki; Kazuhiko Sunakawa; Yoichi Yaguchi
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Paper Abstract

Precision micro holes and structures with smooth internal surfaces are introduced. We adopted a high repetition rate femtosecond laser to form optically damaged structures inside a silica glass. The glass is dissolved by HF aqueous solution after the laser irradiation. Through this process, we could obtain micro structures with smooth internal surfaces. We investigated the effects of laser repetition rate on surface roughness. It is suggested that one of the causes increased hole surface roughness is the increase in the defects by the laser irradiation.

Paper Details

Date Published: 8 October 2004
PDF: 5 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596597
Show Author Affiliations
Takayuki Nakaya, Namiki Precision Jewel Co., Ltd. (Japan)
Daisuke Shibata, Namiki Precision Jewel Co., Ltd. (Japan)
Hidetoshi Takeda, Namiki Precision Jewel Co., Ltd. (Japan)
Hiroaki Toshima, Namiki Precision Jewel Co., Ltd. (Japan)
Toshiro Kotaki, Namiki Precision Jewel Co., Ltd. (Japan)
Kazuhiko Sunakawa, Namiki Precision Jewel Co., Ltd. (Japan)
Yoichi Yaguchi, Namiki Precision Jewel Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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