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Proceedings Paper

Wide band-gap materials microprocessing by femtosecond laser pulses
Author(s): Egidijus Vanagas; Jouji Kawai; Yury Zaparozhchanka; Dmitry Tuzhilin; Hirofumi Musasa; Pavel Rutkovski; Igor Kudryashov; Shoji Suruga
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Paper Abstract

The experimental results of wide band-gap materials treatment by femtosecond laser pulses are presented and discussed. Borosilicate glass drilling in air and vacuum, the surface and in-bulk three-dimensional laser processing with sub-micrometer resolution are subject of investigatios. Technical issues relevant for achieving high spatial resolution in order to meet requirements of nanotechnology at feature size smaller than 10 nm along with the issues of fabrication efficiency are outlined. Also, we show a concept of modular laser processing system, which can be flexibly optimized for processing by femtosecond laser pulses.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596595
Show Author Affiliations
Egidijus Vanagas, Tokyo Instruments, Inc. (Japan)
Jouji Kawai, Tokyo Instruments, Inc. (Japan)
Yury Zaparozhchanka, Tokyo Instruments, Inc. (Japan)
Dmitry Tuzhilin, Tokyo Instruments, Inc. (Japan)
Hirofumi Musasa, Tokyo Instruments, Inc. (Japan)
Pavel Rutkovski, Tokyo Instruments, Inc. (Japan)
Igor Kudryashov, Tokyo Instruments, Inc. (Japan)
Shoji Suruga, Tokyo Instruments, Inc. (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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