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Proceedings Paper

Laser micromachining of ultraviolet and infrared simultaneous irradiation
Author(s): Akihiro Kai; Yoshiyuki Kawamura
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Paper Abstract

In this study, three-dimensional microstructures are manufactured using a laser micro machining system, which consists of an ultraviolet pulsed laser and a stage having five degree of freedom. The works are controlled to move by the five-axis micro machining system to an arbitrary position, and three-dimensional microstructures can be manufactured. We have succeeded in machining a micro gear, a micro windmill and a micro globe made of polyamide resin by this system. We were machined a conic shape to study a precision limit of this system. We have succeeded in machining a conic tip having radius of curvature less than 1 μm by use of this system. In order to try improving the laser machining characteristics, we have modified the optical system in order to irradiated materials with fourth harmonics and fundamentals of an Nd-YAG laser, simultaneously. We had observed decrease of debris by simultaneous irradiation of the UV-laser and the IR-laser.

Paper Details

Date Published: 8 October 2004
PDF: 5 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596550
Show Author Affiliations
Akihiro Kai, Fukuoka Institute of Technology (Japan)
Yoshiyuki Kawamura, Fukuoka Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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