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Proceedings Paper

Low resistivity glass metallization by laser induced plasma-assisted ablation
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Paper Abstract

A novel direct-write glass metallization based on laser induced plasma assisted ablation (LIPAA) was investigated. Laser is passed through a glass substrate and irradiated onto a metal target placed beneath the substrate. By tuning laser fluence above target ablation threshold, target ablation and plasma generation occur. The plasma flies towards the glass at a high speed and deposits metal materials onto glass backside surface. Metal films were fabricated and their sheet resistances were measured by a four-point probe. It was found that sheet resistances of the metal films vary with processing parameters. Experimental results reveal that low resistivity metal film (< 0.3 Ω/∠) can be obtained at an optimal laser scanning speed and pulse repetition rate. When target-to-substrate distance increases, film resistance also increases. Optimal design of overlap schemes among metal tracks provides a lower film resistance. Meanwhile, thin film and bulk metal targets were used to study their difference on film resistance. It was discovered that deposition using thin film target is more efficient. Laser annealing technique was also applied to activate the deposited metal materials to get higher quality glass surface metallization.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596543
Show Author Affiliations
Ming Hui Hong, Data Storage Institute (Singapore)
National Univ. of Singapore (Singapore)
Qiong Xie, Data Storage Institute (Singapore)
B. C. Lim, National Univ. of Singapore (Singapore)
Koji Sugioka, RIKEN--The Institute of Physical and Chemical Research (Japan)
Katsumi Midorikawa, RIKEN--The Institute of Physical and Chemical Research (Japan)
Kaidong D. Ye, National Univ. of Singapore (Singapore)
Luping P. Shi, Data Storage Institute (Singapore)
Tow Chong Chong, Data Storage Institute (Singapore)
National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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