Share Email Print
cover

Proceedings Paper

Micromachining of transparent materials by laser-induced plasma-assisted ablation (LIPAA)
Author(s): Yasutaka Hanada; Koji Sugioka; Kotaro Obata; H. Takase; Hiroshi Takai; I. Miyamoto; Katsumi Midorikawa
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Laser-induced plasma-assisted ablation (LIPAA) process developed for glass materials has been applied for micromachining of a variety of transparent hard and soft materials. We have developed the proto-type LIPAA system using a second harmonic of diode pumped Q-switched Nd:YAG laser for the practical use. In this paper, micromachining and scribing of glass and sapphire is demonstrated using the developed system. Additionally, another application such as selective metallization of glass and polyimide with successive metal plating process is investigated. However, mechanism of this process is complex and still remains unknown. To have a better understanding of this process, double-pulse irradiation of a near-IR femtosecond (fs) laser with a delay time is also investigated. A possible mechanism is discussed based on the obtained results.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596541
Show Author Affiliations
Yasutaka Hanada, RIKEN-The Institute of Physical and Chemical Research (Japan)
Tokyo Univ. of Science (Japan)
Koji Sugioka, RIKEN-The Institute of Physical and Chemical Research (Japan)
Tokyo Univ. of Science (Japan)
Kotaro Obata, RIKEN-The Institute of Physical and Chemical Research (Japan)
H. Takase, Tokyo Denki Univ. (Japan)
Hiroshi Takai, Tokyo Denki Univ. (Japan)
I. Miyamoto, Tokyo Univ. of Science (Japan)
Katsumi Midorikawa, RIKEN-The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

© SPIE. Terms of Use
Back to Top