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Proceedings Paper

Creation of carbide in critical CO2 by UV laser
Author(s): Taku Arai; Takaya Uchida; Naohiro Fukuda; Yoshikazu Yoshida; Toru Maekawa
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Paper Abstract

A YAG laser of 266 nm is focused just above or at the surface of a Ni substrate in a near critical CO2 chamber. Since the compressibility of CO2 becomes very high, strong shock waves may be produced by laser irradiation. We are going to investigate the dependence of the nano structures for nickel and CO2 on the laser power and the focus point. After the laser radiation, we found fine grains on the Ni substrate with a scanning electron microscopy and energy dispersive X-ray spectroscopy.

Paper Details

Date Published: 8 October 2004
PDF: 4 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596534
Show Author Affiliations
Taku Arai, Toyo Univ. (Japan)
Takaya Uchida, Toyo Univ. (Japan)
Naohiro Fukuda, Toyo Univ. (Japan)
Yoshikazu Yoshida, Toyo Univ. (Japan)
Toru Maekawa, Toyo Univ. (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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