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Proceedings Paper

Carbon and silica coating by UV laser spray
Author(s): Toshinao Otomo; Yshikazu Yoshida; Kentaro Nakamura
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Paper Abstract

A laser spray method, which melts and ablates ultra-fine powder dropped at a small angle to a focused FHG Nd: YAG laser beam in the air, has been developed. The powder contains carbon of 5 μm in diameter and silica of 0.8, 4 and 63 μm in diameter. The 30 μm diameter beam is focused on the substrate in the vicinity of a syringe outlet. The leakage beam falls on the substrate to be deposited and can be expected to perform the effect of annealing. Deposited silica coatings on nickel substrates were analyzed with a scanning electron microscopy, energy dispersive X-ray spectroscopy, and X-ray diffractometer.

Paper Details

Date Published: 8 October 2004
PDF: 4 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596416
Show Author Affiliations
Toshinao Otomo, Toyo Univ. (Japan)
Yshikazu Yoshida, Toyo Univ. (Japan)
Kentaro Nakamura, Toyo Univ. (Japan)


Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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