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Proceedings Paper

Fabrication of cylindrical plastic microlens using Er:YAG laser beam: influence of process parameters
Author(s): Hery Mochtady; Keiji Yamada; Takashi Ueda; Akira Hosokawa
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Paper Abstract

Microlenses are widely used as components of optical device in LCD display, optical interconnection, scanner and others. It is important to fabricate microlens in any kind of form to satisfy any requirement of optical device. Also, the integration of microlens and optical devices is required to save weight, reduce production cost, and get higher accurate alignment. We have developed a novel method to fabricate spherical plastic microlens using Er:YAG laser beam. In this method, laser beam are shot to the surface of an acrylate resin to form microlens on this surface. In this paper, a method to fabricate cylindrical plastic microlens is proposed. Microlenses are fabricated under several conditions, and the influences of process parameters to geometry of microlens will be discussed.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596306
Show Author Affiliations
Hery Mochtady, Kanazawa Univ. (Japan)
Keiji Yamada, Kanazawa Univ. (Japan)
Takashi Ueda, Kanazawa Univ. (Japan)
Akira Hosokawa, Kanazawa Univ. (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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