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Proceedings Paper

Fabrication of microlens using CO2laser
Author(s): Hiroshi Murotani; Kenji Nakamoto; Hideo Fukumoto; Moriaki Wakaki
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Paper Abstract

Microlenses were formed directly on a surface of a glass plate by using CO2 laser. This method has the merit of complete dry processing and presents simple way of microlens fabrication. We discuss about the formation process and mechanism through the characterization of irradiation parameters and the glass composition. When the surface of a glass plate is heated locally to a working point of the glass material by a focused CO2 laser beam, a microlens is formed owing to surface tension. It was found possible to fabricate microlens easily placed at different focal position by controlling a laser power and an irradiation time. The volume of the fabricated microlens was found to be dependent on laser irradiation energy (laser power x irradiation time) and irradiated position. When a Corning 7059 glass plate was used, a convex microlens was obtained at the energy density smaller than ca. 100 (μJ/μm2).

Paper Details

Date Published: 8 October 2004
PDF: 5 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596304
Show Author Affiliations
Hiroshi Murotani, Tokai Univ. (Japan)
Kenji Nakamoto, Tokai Univ. (Japan)
Hideo Fukumoto, Tokai Univ. (Japan)
Moriaki Wakaki, Tokai Univ. (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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