Share Email Print

Proceedings Paper

UV-laser assisted fabrication of integrated-optical Bragg sensor components in a planar polymer chip
Author(s): Carsten Wochnowski; Michael Koerdt; Simeon Metev; Frank Vollertsen
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

By UV-laser irradiation the refractive index of some polymers can be locally increased in a controllable way. So by mask lithographic methods integrated-optical waveguiding and dispersive structures can be generated in the surface of a planar polymer chip. Thus a polymeric Bragg-sensor component in integrated-optical form was fabricated by the UV-light of an excimer laser. The surface morphology and optical-functional properties of the polymeric Bragg sensor component have been examined especially in dependence on the irradiation parameters and the temperature. The investigations yield the suitability of the Bragg-sensor for the measurements of temperature and deformation. For the realization of a passive fiber-chip coupling for the integrated-optical components a new technology has been developed and tested. The precise control and high-resolution ablation capability inherent in excimer laser machining make it ideally suited for creating grooves for passive alignment of optical fibers to planar channel waveguides.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.596301
Show Author Affiliations
Carsten Wochnowski, Bremer Institut fur Angewandte Strahltechnik (Germany)
Michael Koerdt, Bremer Institut fur Angewandte Strahltechnik (Germany)
Simeon Metev, Bremer Institut fur Angewandte Strahltechnik (Germany)
Frank Vollertsen, Bremer Institut fur Angewandte Strahltechnik (Germany)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

© SPIE. Terms of Use
Back to Top