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Proceedings Paper

Laser microfabrication of three-dimensional photonic crystal templates in polymers
Author(s): Vygantas Mizeikis; Kock Khuen Seet; Saulius Juodkazis; Hiroaki Misawa
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Paper Abstract

Three-dimensional woodpile photonic crystal structures were recorded in films of polymeric photoresists polymethylcrylate (PMMA) and SU-8 films by femtosecond laser microfabrication technique. The fabricated structures consist of periodic arrays of extended elliptical void-channels in PMMA, and of solid elliptical rods of cross-linked polymer in SU-8. Their lattice periods of several micrometers and typical sub-micrometric feature sizes allowed to confirm presence of pronounced photonic stop-bands at infrared wavelengths around 2.0 - 8.0 μm.

Paper Details

Date Published: 8 October 2004
PDF: 6 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.595880
Show Author Affiliations
Vygantas Mizeikis, Japan Science and Technology Agency (Japan)
Hokkaido Univ. (Japan)
Kock Khuen Seet, Japan Science and Technology Agency (Japan)
Hokkaido Univ. (Japan)
Saulius Juodkazis, Japan Science and Technology Agency (Japan)
Hokkaido Univ. (Japan)
Hiroaki Misawa, Japan Science and Technology Agency (Japan)
Hokkaido Univ. (Japan)


Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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