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Proceedings Paper

Laser machinable glass
Author(s): Hirotaka Koyo; Masanori Shojiya; Keiji Tsunetomo
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Paper Abstract

Recently we found that titanium ions in glass are effective to reduce the ablation threshold in the UV laser irradiation. In case of Nd:YAG fourth harmonic generation (FHG, wavelength: 266 nm) irradiation, glass containing titanium ions showed 1/10 times smaller threshold compared with conventional one used for optics or windows. We named this Ti-containing glass Laser Machinable Glass (LMG). In this paper we present some applications made of LMG, a 4x4 planar micro hole array (PMH) for optical fibers alignment, a micro well array for reaction of a small amount of chemicals, and a micro channel used in the bio-chemical field. Using LMG for laser machining, all samples were fabricated precisely without cracking and chipping. We also successfully synthesized new Ti-containing laser machinable glass with thermal expansion coefficient below 40x10-7 K-1. The ablation threshold of this low-thermal-expansion glass was about 1.4 times lower than that of Pyrex. Moreover, this glass showed 25 times higher durability to NaOH (pH=10) than Pyrex.

Paper Details

Date Published: 8 October 2004
PDF: 4 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.595770
Show Author Affiliations
Hirotaka Koyo, Nippon Sheet Glass Co., Ltd. (Japan)
Masanori Shojiya, Nippon Sheet Glass Co., Ltd. (Japan)
Keiji Tsunetomo, Nippon Sheet Glass Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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