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Proceedings Paper

Three-dimensional laser microfabrication
Author(s): Koji Sugioka
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Paper Abstract

Laser microfabrication is currently one of key technologies for manufacturing various kinds of microdevices and microsystems. Additionally, three-dimensional (3-D) laser microfabrication is getting more important and more desirable for integrating functions and miniaturizing the size of devices and systems. The present paper describes a variety of 3-D laser microfabrication based on chemical vapor deposition (CVD), ablation modification and lithography. One of the hottest topics in this field is fabrication of 3-D microstructures embedded in transparent materials by multiphoton absorption process using femtosecond laser. Advantages of 3-D laser microfabrication is also discussed by comparison with competitive techniques like mechanical machining, electron beam processing and ion beam processing.

Paper Details

Date Published: 8 October 2004
PDF: 9 pages
Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); doi: 10.1117/12.595676
Show Author Affiliations
Koji Sugioka, RIKEN--The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 5662:
Fifth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Henry Helvajian; Kazuyoshi Itoh; Kojiro F. Kobayashi; Andreas Ostendorf; Koji Sugioka, Editor(s)

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