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Proceedings Paper

Scanning confocal microscope for accurate dimensional measurement
Author(s): Steven E. Mechels; Matthew Young
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Paper Abstract

We have improved and evaluated a scanning confocal microscope for the precise measurement of optical fiber cladding diameter. In particular, we have studied the systematic error that results from a finite detector aperture and concluded that the diameter of that aperture must be less than one-half the radius of the Airy disk in the detector plane. We compared our measurements with a chrome-on-glass standard reference material provided by NIST- Gaithersburg and with optical fibers that were measured with a contact micrometer. We estimate the overall uncertainty of our measurements to be around +/- 50 nm.

Paper Details

Date Published: 26 June 1992
PDF: 9 pages
Proc. SPIE 1660, Biomedical Image Processing and Three-Dimensional Microscopy, (26 June 1992); doi: 10.1117/12.59541
Show Author Affiliations
Steven E. Mechels, National Institute of Standards and Technology (United States)
Matthew Young, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 1660:
Biomedical Image Processing and Three-Dimensional Microscopy
Raj S. Acharya; Carol J. Cogswell; Dmitry B. Goldgof, Editor(s)

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