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Proceedings Paper

Damage of MEMS thermal actuators heated by laser irradiation
Author(s): Leslie M. Phinney; Kelly A. Klody; John T. Sackos; Jeremy A. Walraven
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Paper Abstract

Optical actuation of microelectromechanical systems (MEMS) is advantageous for applications for which electrical isolation is desired. Thirty-two polycrystalline silicon opto-thermal actuators, optically-powered MEMS thermal actuators, were designed, fabricated, and tested. The design of the opto-thermal actuators consists of a target for laser illumination suspended between angled legs that expand when heated, providing the displacement and force output. While the amount of displacement observed for the opto-thermal actuators was fairly uniform for the actuators, the amount of damage resulting from the laser heating ranged from essentially no damage to significant amounts of damage on the target. The likelihood of damage depended on the target design with two of the four target designs being more susceptible to damage. Failure analysis of damaged targets revealed the extent and depth of the damage.

Paper Details

Date Published: 22 January 2005
PDF: 8 pages
Proc. SPIE 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, (22 January 2005); doi: 10.1117/12.594408
Show Author Affiliations
Leslie M. Phinney, Sandia National Labs. (United States)
Kelly A. Klody, Sandia National Labs. (United States)
John T. Sackos, Sandia National Labs. (United States)
Jeremy A. Walraven, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 5716:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
Danelle M. Tanner; Rajeshuni Ramesham, Editor(s)

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