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Proceedings Paper

Printed active-matrix TFT arrays for x-ray imaging
Author(s): Robert A. Street; William S. Wong; Steve Ready; Rene Lujan; Ana C. Arias; Michael L. Chabinyc; Alberto Salleo; Raj Apte; Larry E. Antonuk
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Paper Abstract

A novel jet-printing approach to fabricate thin film transistor (TFT), active matrix backplanes for x-ray imagers is described. The technique eliminates the use of photolithography and has the potential to greatly reduce the array manufacturing cost. We show how jet-printing is used to pattern the layers of the active matrix array and also to deposit semiconductor material. The technique is applied to both amorphous silicon and polymer transistors, and small prototype arrays have been fabricated and tested, including arrays with a high fill factor amorphous silicon p-i-n photodiode layer for indirect detection x-ray imaging applications. The TFT characteristics are excellent, and acquired x-ray images will be presented and compared to those from conventional TFT arrays. The printing process has been extended to flexible substrates which are important for rugged x-ray imagers, using a low temperature amorphous silicon process to accommodate the plastic substrate. Polymer TFT arrays made with jet-printed polymer solutions have also been demonstrated and we present data from arrays, and discuss options for integrating organic photodiodes or direct detection sensors. The opportunities and challenges of using polymer semiconductors in x-ray imaging arrays, are discussed and we show that the TFT performance meets the needs of radiographic imaging, although the radiation hardness and long term degradation are not sufficiently studied.

Paper Details

Date Published: 20 April 2005
PDF: 11 pages
Proc. SPIE 5745, Medical Imaging 2005: Physics of Medical Imaging, (20 April 2005); doi: 10.1117/12.593521
Show Author Affiliations
Robert A. Street, Palo Alto Research Ctr. (United States)
William S. Wong, Palo Alto Research Ctr. (United States)
Steve Ready, Palo Alto Research Ctr. (United States)
Rene Lujan, Palo Alto Research Ctr. (United States)
Ana C. Arias, Palo Alto Research Ctr. (United States)
Michael L. Chabinyc, Palo Alto Research Ctr. (United States)
Alberto Salleo, Palo Alto Research Ctr. (United States)
Raj Apte, Palo Alto Research Ctr. (United States)
Larry E. Antonuk, Univ. of Michigan/Ann Arbor (United States)

Published in SPIE Proceedings Vol. 5745:
Medical Imaging 2005: Physics of Medical Imaging
Michael J. Flynn, Editor(s)

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