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Proceedings Paper

New laser patterning technology with dynamic focus control for 3D MIDs
Author(s): Toshiyuki Suzuki; T. Shindo; Shingo Yuasa
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Paper Abstract

We have developed an original laser structuring process for MIDs in harmony with laser patterning technology recently displaying remarkable technical innovation.. For creating MID products, conventional patterning technology is unable to meet the requirements for complicated three-dimensional shapes, finer circuits and higher accuracy because of involving the following problems. 1) It is difficult to execute highly accurate and fine circuit patterning on surfaces at a 90° angle with level difference of 4mm or over. 2) It is difficult to assure the quality on surfaces such as sloped surfaces where the workability is varied. 3) The productivity is lowered due to fine circuit patterning. We have solved the above problems through dynamic control of laser structuring parameters, using a dynamic focusing system, and it has enabled the following improvements. 1) Successive laser patterning on surfaces with level difference of 10mm. 2) Fine circuit (track/gap = 30μm/30μm) patterning in same circuit on surfaces at a 90°angle. 3) Quality assurance and productivity improvement by structuring parameters best for patterning.

Paper Details

Date Published: 12 April 2005
PDF: 7 pages
Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); doi: 10.1117/12.593358
Show Author Affiliations
Toshiyuki Suzuki, Matsushita Electric Works, Ltd. (Japan)
T. Shindo, Matsushita Electric Works, Ltd. (Japan)
Shingo Yuasa, Matsushita Electric Works R&D Lab., Inc. (United States)


Published in SPIE Proceedings Vol. 5713:
Photon Processing in Microelectronics and Photonics IV
Jim Fieret; David B. Geohegan; Friedrich G. Bachmann; Willem Hoving; Frank Träger; Peter R. Herman; Jan J. Dubowski; Tatsuo Okada; Kunihiko Washio; Yongfeng Lu; Craig B. Arnold, Editor(s)

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