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Proceedings Paper

Intracavity laser spectroscopy
Author(s): George H. Atkinson
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Paper Abstract

The principles of intracavity laser spectroscopy (US) together with the experimental conditions which permit the detection of absorption with extremely high sensitivity are briefly described. Special attention is given to the optical parameters which need to be controlled in the U.S laser and to the observational conditions under which quantitative measurements can be made. Applications of ILS to the in situ monitoring of chemical vapor deposition of thin film materials and the quantitative characterization of absorption lines (e.g., line strengths and collisional broadening coefficients) are described. Recent results on the design and performance of solid-state ILS lasers operating in the infrared also are presented.

Paper Details

Date Published: 1 May 1992
PDF: 8 pages
Proc. SPIE 1637, Environmental and Process Monitoring Technologies, (1 May 1992); doi: 10.1117/12.59331
Show Author Affiliations
George H. Atkinson, Optical Sciences Ctr./Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 1637:
Environmental and Process Monitoring Technologies
Tuan Vo-Dinh, Editor(s)

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