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Proceedings Paper

Ultrasensitive detection of trace gases with diode lasers by frequency modulation spectroscopy
Author(s): David E. Cooper
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Paper Abstract

Frequency modulation spectroscopy (FMS) with mid- and near-infrared tunable diode lasers is an attractive approach for a number of applications that require ultrasensitive detection of trace gases. The technique combines high detection sensitivity with high detection speed and is capable of detecting numerous small molecular weight compounds at levels ranging from low parts-per-million (ppm) to sub-parts-per-billion (ppb). We will review the principles of FMS and discuss its application in areas relevant to materials processing.

Paper Details

Date Published: 14 May 1992
PDF: 7 pages
Proc. SPIE 1636, Applied Spectroscopy in Materials Science II, (14 May 1992); doi: 10.1117/12.59288
Show Author Affiliations
David E. Cooper, SRI International (United States)


Published in SPIE Proceedings Vol. 1636:
Applied Spectroscopy in Materials Science II
William G. Golden, Editor(s)

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