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Proceedings Paper

Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer
Author(s): Christophe Gorecki; Lukasz Nieradko; Andrei Sabac; Michal Jozwik; Alain Jackobelli; Thierry Dean; Rolf Hoffman; Andreas Bertz
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Paper Abstract

There is a great need for techniques that will permit the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer, monolithically integrated into the PZT actuated membrane and electrostatically actuated torsional micromirror. The application of membrane-type structure is in the area of pressure sensors. The monolithically integrated MZI on movable torsional mirror seems to be an easy solution for monitoring mechanical performances during lifetime of micromirror.

Paper Details

Date Published: 22 January 2005
PDF: 6 pages
Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); doi: 10.1117/12.592237
Show Author Affiliations
Christophe Gorecki, Univ. de Franche-Comte (France)
Lukasz Nieradko, Univ. de Franche-Comte (France)
Andrei Sabac, Univ. de Franche-Comte (France)
Michal Jozwik, Univ. de Franche-Comte (France)
Alain Jackobelli, Thales Research and Technology (France)
Thierry Dean, Thales Research and Technology (France)
Rolf Hoffman, Chemnitz Univ. of Technology (Germany)
Andreas Bertz, Chemnitz Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 5719:
MOEMS and Miniaturized Systems V
Ayman El-Fatatry, Editor(s)

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