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Proceedings Paper

Actively controlled diffraction grating interferometer MEMS devices
Author(s): Byungki Kim; Michael C. Schmittdiel; F. Levent Degertekin; Thomas R. Kurfess
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Paper Abstract

A micrograting interferometer has been fabricated to use in measuring the static and dynamic performance of MEMS devices. These measurements aid in qualifying the functionality of fabricated MEMS devices, as well as improving fabrication techniques. The metrology system uses a phase sensitive diffraction grating for interferometric axial resolution and a microfabricated lens for improved lateral resolution. In addition, active control is applied to the system to reduce the impact of mechanical vibrations and insure a high degree of measurement sensitivity. The control scheme is demonstrated successfully in the scanning of MEMS devices in the experiment. A deformable grating, which controls measurement sensitivity, has been fabricated and integrated with optoelectronics in small volume. Experiments with the integrated package demonstrate that the measurement sensitivity can be adjusted by actuating the deformable grating. This integrated single device illustrates that the deformable grating sensor can be expanded to form arrays for parallel measurement of MEMS device.

Paper Details

Date Published: 22 January 2005
PDF: 8 pages
Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); doi: 10.1117/12.592215
Show Author Affiliations
Byungki Kim, Georgia Institute of Technology (United States)
Naval Postgraduate School (United States)
Michael C. Schmittdiel, Georgia Institute of Technology (United States)
F. Levent Degertekin, Georgia Institute of Technology (United States)
Thomas R. Kurfess, Georgia Institute of Technology (United States)


Published in SPIE Proceedings Vol. 5721:
MOEMS Display and Imaging Systems III
Hakan Urey; David L. Dickensheets, Editor(s)

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