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Proceedings Paper

Measurement of the Mueller matrix of an elliptical-mirror scatterometer
Author(s): Neil Charles Bruce; Oscar Rodriguez-Herrera
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Paper Abstract

We have recently developed a scatterometer which uses an elliptical mirror to direct the light scattered from a rough surface onto a CCD camera. This scatterometer is faster than the traditional arm based devices, and can measure the bi-dimensional scatter pattern. In the present work we present results for the calculation of the Mueller matrix of the elliptical mirror with the aim of using this information to correct the measured Mueller matrix for the instrumental contribution, to obtain the Mueller matrix of the scattering process.

Paper Details

Date Published: 21 October 2004
PDF: 6 pages
Proc. SPIE 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, (21 October 2004); doi: 10.1117/12.592176
Show Author Affiliations
Neil Charles Bruce, Univ. Nacional Autonoma de Mexico (Mexico)
Oscar Rodriguez-Herrera, Univ. Nacional Autonoma de Mexico (Mexico)


Published in SPIE Proceedings Vol. 5622:
5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications
Aristides Marcano O.; Jose Luis Paz, Editor(s)

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