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Proceedings Paper

Holographic lithography for electroforming submicrometric structures
Author(s): L. E. Gutierrez R.; Lucila H. D. Cescato; E. J. Carvalho
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Paper Abstract

In this paper we proposed and demonstrated the association of holographic lithography with electroforming to produce submicrometric metallic structures. To demonstrate the potential of the technique, different types of submicrometric metallic structures were generated: periodic lines, nano-tunnels and arrays of holes. Such structures can met different applications from optics to micromechanical systems.

Paper Details

Date Published: 21 October 2004
PDF: 5 pages
Proc. SPIE 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, (21 October 2004); doi: 10.1117/12.592175
Show Author Affiliations
L. E. Gutierrez R., Univ. Estadual de Campinas (Brazil)
Lucila H. D. Cescato, Univ. Estadual de Campinas (Brazil)
E. J. Carvalho, Univ. Estadual de Campinas (Brazil)


Published in SPIE Proceedings Vol. 5622:
5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications
Aristides Marcano O.; Jose Luis Paz, Editor(s)

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