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Proceedings Paper

Research of silicon cantilever resonant pressure sensor
Author(s): Zhengyuan Zhang; Shilu Xu; Jie Qin; Gangyi Hu; Shangchun Fan; Yukui Liu
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Paper Details

Date Published:
PDF: 9 pages
Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, ; doi: 10.1117/12.592166
Show Author Affiliations
Zhengyuan Zhang, National Lab. of Analog Integrated Circuits (China)
Shilu Xu, National Lab. of Analog Integrated Circuits (China)
Jie Qin, BeiHang Univ. (China)
Gangyi Hu, National Lab. of Analog Integrated Circuits (China)
Shangchun Fan, BeiHang Univ. (South Korea)
Yukui Liu, National Lab. of Analog Integrated Circuits (China)


Published in SPIE Proceedings Vol. 5715:
Micromachining and Microfabrication Process Technology X
Mary-Ann Maher; Harold D. Stewart, Editor(s)

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