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Proceedings Paper

Fabrication of high-Tc superconducting hot electron bolometers for terahertz mixer applications
Author(s): Jean-Claude Villegier; Annick F. Degardin; Bruno Guillet; Frederic Houze; Alain J. Kreisler; Michel Chaubet
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Paper Abstract

Superconducting Hot Electron Bolometer (HEB) mixers are a competitive alternative to Schottky diode mixers or other conventional superconducting receiver technologies in the terahertz frequency range because of their ultrawide bandwidth (from millimeter waves to the visible), high conversion gain, and low intrinsic noise level, even at 77 K. A new technological process has been developed to realize HEB mixers based on high temperature superconducting materials, using 15 to 40 nm thick layers of YBa2Cu3O7-δ (YBCO), sputtered on MgO (100) substrates by hollow cathode magnetron sputtering. Critical temperature values of YBCO films were found in the 85 to 91 K range. Sub-micron HEB bridges (0.8 μm x 0.8 μm) were obtained by combining electronic and UV lithography followed by selective etching techniques. Realization of YBCO HEB coupling to planar integrated gold antennas was also considered.

Paper Details

Date Published: 25 March 2005
PDF: 7 pages
Proc. SPIE 5727, Terahertz and Gigahertz Electronics and Photonics IV, (25 March 2005); doi: 10.1117/12.592106
Show Author Affiliations
Jean-Claude Villegier, CEA Grenoble (France)
Annick F. Degardin, CNRS, Supelec, Univ. Paris VI (France)
Bruno Guillet, CNRS, Supelec, Univ. Paris VI (France)
Frederic Houze, CNRS, Supelec, Univ. Paris VI (France)
Alain J. Kreisler, CNRS, Supelec, Univ. Paris VI (France)
Michel Chaubet, Ctr. National d'Etudes Spatiales (France)

Published in SPIE Proceedings Vol. 5727:
Terahertz and Gigahertz Electronics and Photonics IV
R. Jennifer Hwu; Kurt J. Linden, Editor(s)

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