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Proceedings Paper

Micro-mirror formed using excimer laser processing in a polymer waveguide
Author(s): Tsuyoshi Shioda
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Paper Abstract

A micro-mirror formed using excimer laser processing for a fluorinated polyimide waveguide film was demonstrated. The tilted excimer laser irradiation to the waveguide core formed a micro-mirror with an angle of 45 +/- 1-degree. The micro-mirror had convex profile and exhibited a lens effect as a concave mirror. The micro-mirror, as formed, exhibited a low reflection loss of approximately 0.6dB at a wavelength of 850nm. This technique applied to flexible optical and electrical circuit board.

Paper Details

Date Published: 4 April 2005
PDF: 5 pages
Proc. SPIE 5724, Organic Photonic Materials and Devices VII, (4 April 2005); doi: 10.1117/12.592060
Show Author Affiliations
Tsuyoshi Shioda, Mitsui Chemicals, Inc. (Japan)


Published in SPIE Proceedings Vol. 5724:
Organic Photonic Materials and Devices VII
James G. Grote; Toshikuni Kaino; Francois Kajzar, Editor(s)

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