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Proceedings Paper

Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD)
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Paper Abstract

This paper reports a research effort to design, microfabricate, and test a uniquely designed waveguide technology with integrated micro-lenses in vertical orientations. The waveguide and integrated focusing lenses were microfabricated using thick photo-resist such as SU-8 with UV-light lithography. The waveguide can be used in various biological and biomedical systems.

Paper Details

Date Published: 22 January 2005
PDF: 6 pages
Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); doi: 10.1117/12.591956
Show Author Affiliations
Ren Yang, Louisiana State Univ. (United States)
Steven A. Soper, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)


Published in SPIE Proceedings Vol. 5718:
Microfluidics, BioMEMS, and Medical Microsystems III
Ian Papautsky; Isabelle Chartier, Editor(s)

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