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Proceedings Paper

Rapid prototyping of plastic microfluidic devices in cyclic olefin copolymer (COC)
Author(s): Jin-Hwan Lee; Erik T. K. Peterson; Gabriel Dagani; Ian Papautsky
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Paper Abstract

In this paper, we report on using polydimethylsiloxane (PDMS) tools to emboss cyclic olefin copolymer (COC). Positive photoresist AZP 4620 was used to fabricate 5 and 20 μm thick PDMS tools. The embossed microchannels were 10 μm to 100 μm in width at 10 μm to 100 μm in spacing. The COC embossing parameters, including temperature, force, and time were optimized to reduce replication errors. The optimized process was then successfully applied to fabrication of a passive microfluidic mixer designed and simulated using CFDRC ACE+.

Paper Details

Date Published: 22 January 2005
PDF: 10 pages
Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); doi: 10.1117/12.591852
Show Author Affiliations
Jin-Hwan Lee, University of Cincinnati (United States)
Erik T. K. Peterson, University of Cincinnati (United States)
Gabriel Dagani, University of Cincinnati (United States)
Ian Papautsky, University of Cincinnati (United States)

Published in SPIE Proceedings Vol. 5718:
Microfluidics, BioMEMS, and Medical Microsystems III
Ian Papautsky; Isabelle Chartier, Editor(s)

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