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Proceedings Paper

Laser-induced phase changes of metallic Ti and W thin films
Author(s): Rodger Evans; Santiago Camacho-Lopez; Raul Rangel-Rojo; M. A. Camacho-Lopez; Celia A. Sanchez-Perez; A. Esparza-Garcia
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Paper Abstract

In this work we present experimental findings in the field of laser matter interaction on the topic of laser induced oxidation and crystalline structure change. It has been shown in the past few years that lasers can be used to induce both oxidization of metals as well changes the crystal in the crystalline structure of the metal oxide. Conventional theory has proven to be mildly successful in predicting these effects with a thermal model; drawing its influence from the traditional method of inducing material change by baking the metal. We reformed a scan of varying values of laser intensity and accumulated fluence. We will show evidence of an increase in the oxygen content in Ti and W thin films irradiated by a frequency doubled Nd:YAG laser source with a pulse duration of 4 ns and per pulse energies of 26 to 60 μJ (peak intensities of 1.7 x 107 to 3.8 x 107 W/cm2). We will also show that other effects, that may include crystalline structure change, are also occurring.

Paper Details

Date Published: 21 October 2004
PDF: 6 pages
Proc. SPIE 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, (21 October 2004); doi: 10.1117/12.591709
Show Author Affiliations
Rodger Evans, Ctr. de Investigacion Cientifica y Educacion Superior de Ensenada (Mexico)
Santiago Camacho-Lopez, Ctr. de Investigacion Cientifica y Educacion Superior de Ensenada (Mexico)
Raul Rangel-Rojo, Ctr. de Investigacion Cientifica y Educacion Superior de Ensenada (Mexico)
M. A. Camacho-Lopez, Univ. Autonoma Metropolitana (Mexico)
Celia A. Sanchez-Perez, Univ. Autonoma Metropolitana (Mexico)
A. Esparza-Garcia, Univ. Autonoma Metropolitana (Mexico)


Published in SPIE Proceedings Vol. 5622:
5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications
Aristides Marcano O.; Jose Luis Paz, Editor(s)

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