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Proceedings Paper

New advances in the planetary multiwafer MOVPE reactor technology
Author(s): Holger Juergensen
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Paper Details

Date Published: 26 June 1992
PDF: 19 pages
Proc. SPIE 1634, Laser Diode Technology and Applications IV, (26 June 1992); doi: 10.1117/12.59170
Show Author Affiliations
Holger Juergensen, AIXTRON GmbH (Germany)

Published in SPIE Proceedings Vol. 1634:
Laser Diode Technology and Applications IV
Daniel S. Renner, Editor(s)

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