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Proceedings Paper

Anodically bonded silicon-glass optical chip for biochemical sensing applications
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Paper Abstract

In this communication, the compatibility of porous silicon and anodic bonding technologies for the realization of sensing microcomponents in lab-on-chip applications has been demonstrated. The two techniques have been combined for the fabrication of a microsensor with biological and chemical molecules sensing capability, in view of its miniaturization and integration with smart micro-dosage systems.

Paper Details

Date Published: 22 January 2005
PDF: 10 pages
Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); doi: 10.1117/12.591696
Show Author Affiliations
Luca De Stefano, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Krzysztof Malecki, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Luigi Moretti, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Ivo Rendina, Istituto per la Microelettronica e Microsistemi, CNR (Italy)


Published in SPIE Proceedings Vol. 5718:
Microfluidics, BioMEMS, and Medical Microsystems III
Ian Papautsky; Isabelle Chartier, Editor(s)

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