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Proceedings Paper

Structural characterization of microcrystalline-amorphous hydrogenated silicon samples prepared by PECVD method
Author(s): A. Orduna-Diaz; M. Rojas Lopez; V. L. Gayou; R. J. Delgado-Macuil; V. H. Mendez-Garcia; R. E. Perez-Blanco; E. Rosendo
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Paper Abstract

Microcrystalline-amorphous doped hydrogenated silicon (μc n+ a-Si:H) samples were prepared by using plasma enhanced chemical vapor deposition (PECVD) method. The samples were deposited on corning substrates at 270°C and then were annealed at 250°C during several hours. Raman scattering spectroscopy was employed to study the amorphous-microcrystalline (μc/a) phase transition and the subsequent microcrystallization process as a function of the annealing time. It was found that the conductivity of the material is closely related to the normalized Raman intensity of the LO mode. In this work, such relation is explained in terms of the impurities activation and by the hydrogen effusion, which takes place during the annealing process. Samples morphology was characterized by atomic force microscopy (AFM). Crystallized silicon islands were observed with an average diameter depending on the annealing time.

Paper Details

Date Published: 21 October 2004
PDF: 4 pages
Proc. SPIE 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, (21 October 2004); doi: 10.1117/12.591693
Show Author Affiliations
A. Orduna-Diaz, Ctr. de Investigacion en Ciencia Aplicada y Tecnologia-IPN (Mexico)
M. Rojas Lopez, Ctr. de Investigacion en Ciencia Aplicada y Tecnologia-IPN (Mexico)
V. L. Gayou, Ctr. de Investigacion en Ciencia Aplicada y Tecnologia-IPN (Mexico)
R. J. Delgado-Macuil, Ctr. de Investigacion en Ciencia Aplicada y Tecnologia-IPN (Mexico)
V. H. Mendez-Garcia, Instituto de Investigacion en Comunicacion Optica (Mexico)
R. E. Perez-Blanco, Univ. Autonoma de Ciudad Juarez (Mexico)
E. Rosendo, Benemerita Univ. Autonoma de Puebla (Mexico)


Published in SPIE Proceedings Vol. 5622:
5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications
Aristides Marcano O.; Jose Luis Paz, Editor(s)

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