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Proceedings Paper

Low-energy damageless Cl2 RIBE of AlGaAs for fabricating laser diodes
Author(s): Jinzhong Yu; Manabu Hamagaki; Tamio T. Hara; Yoshinobu Aoyagi; Yoshihiko Yuba; Susumu Namba
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Paper Abstract

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Paper Details

Date Published: 26 June 1992
PDF: 8 pages
Proc. SPIE 1634, Laser Diode Technology and Applications IV, (26 June 1992); doi: 10.1117/12.59162
Show Author Affiliations
Jinzhong Yu, Institute of Semiconductors (China)
Manabu Hamagaki, Institute of Physical and Chemical Research (Japan)
Tamio T. Hara, Institute of Physical and Chemical Research (Japan)
Yoshinobu Aoyagi, Institute of Physical and Chemical Research (Japan)
Yoshihiko Yuba, Osaka Univ. (Japan)
Susumu Namba, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 1634:
Laser Diode Technology and Applications IV
Daniel S. Renner, Editor(s)

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