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Proceedings Paper

Electrostatic microrelays with adjustable parameters
Author(s): Nikolay Ivanovich Mukhurov; Georgiy Ignatievich Efremov
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Paper Abstract

Basic layout of micro-relays based on electrostatic operation principle with adjustable parameters (ESRA) for flat-parallel electrodes placement is characterised by that the anchor with immovable electrode is connected with base substrate by elastic holders and is fixed on a reversing electro-mechanical micro-drive. The ledges are formed in the elastic holders in an appointed place and at a designed height, on which the contacts of controlling circuit are placed. Due to elastic bond of the anchor, the micro-drive enable to change gradually inter-electrodes distance t providing stepless Uon adjustment in the 0.03 to 2.80 range of nominal operation voltage. Simultaneously, the tc increases or decreases proportionally maintaining the appointed value of ΔU gradient of Uon and Uoff voltages. In practice, the minimum ΔU value could be close to zero. Hence, the ESRA of the same typical size could operate in electric circuits under various fixed Uon values. Its usage is particularly effective in layouts providing non-stationary processes control (for instance, variation of temperature or effort in accordance with appointed program) owing to corresponding set of necessary inter-electrodes distance using the micro-drive.

Paper Details

Date Published: 22 January 2005
PDF: 4 pages
Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.591441
Show Author Affiliations
Nikolay Ivanovich Mukhurov, Institute of Electronics (Belarus)
Georgiy Ignatievich Efremov, Institute of Electronics (Belarus)


Published in SPIE Proceedings Vol. 5717:
MEMS/MOEMS Components and Their Applications II
Albert K. Henning, Editor(s)

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