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Proceedings Paper

Integration of microlens with planar lightwave circuit
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Paper Abstract

A silica micro-lens pair has been proposed which can be integrated with planar optical waveguide circuits. The lens pair enables an optical signal to travel in free space between two opposing planar waveguides with minimal optical loss. Each lens in the lens pair consists of a slab GRIN lens with a convexly shaped front face. This paper briefly reviews the micro-lens design process and reports progress in fabricating the device. The characterisation of the GRIN layer and masking experiments used to evaluate the deep oxide etch are presented. A selectivity of 250:1 was achieved for the deep oxide etch using a NiCr mask.

Paper Details

Date Published: 11 March 2005
PDF: 9 pages
Proc. SPIE 5731, Photonics Packaging and Integration V, (11 March 2005); doi: 10.1117/12.591373
Show Author Affiliations
Mark R. Mackenzie, The Univ. of New South Wales (Australia)
Chee Yee Kwok, The Univ. of New South Wales (Australia)
Gang Ding Peng, The Univ. of New South Wales (Australia)

Published in SPIE Proceedings Vol. 5731:
Photonics Packaging and Integration V
Randy A. Heyler; Ray T. Chen, Editor(s)

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