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Proceedings Paper

Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes
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Paper Abstract

This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25%.

Paper Details

Date Published: 22 January 2005
PDF: 9 pages
Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.591275
Show Author Affiliations
Yoshikazu Hishinuma, Jet Propulsion Lab. (United States)
Eui-Hyeok Yang, Jet Propulsion Lab. (United States)
Bruce Martin Levine, Jet Propulsion Lab. (United States)
Eric E. Bloemhof, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 5717:
MEMS/MOEMS Components and Their Applications II
Albert K. Henning, Editor(s)

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