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Proceedings Paper

Discrete microactuator of arbitrary positioning for linearization of VOA characteristic
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Paper Abstract

We proposed a discrete microactuator enabling a nonlinear displacement with respect to digital input by employing electrostatic comb electrodes of curved shape. The comb electrodes were designed to implement a linearization in variable optical attenuator (VOA) with a constant step of 0.5 dB. The experimental insertion loss (IL) was 1.1 dB and attenuation range was 32.6 dB with 4.2% in linearity.

Paper Details

Date Published: 22 January 2005
PDF: 7 pages
Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.591204
Show Author Affiliations
Jong Hyun Lee, Gwangju Institute of Science and Technology (South Korea)
Man Geun Kim, Gwangju Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 5717:
MEMS/MOEMS Components and Their Applications II
Albert K. Henning, Editor(s)

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